A unique approach to detect chemical speciation and distribution on nanometer-scale nuclear materials has been achieved by the combination of neutron reflectometry and shell-isolated surface-enhanced Raman spectroscopy. Both surface and underlying layers of the uranium oxide materials were determined with angstrom-level resolution. Our results reveal that the UO(x) film is composed of three sublayers: an ∼38 Å thick layer of U(3)O(8) formed along the UO(x)/substrate interface; the adjacent sublayer consists of an ∼900 Å thick single phase of α-UO(3), and the top layer is γ-UO(3) with a thickness of ∼115 Å.