We observed a transition from film to vertically well-aligned nanorods for ZnO grown on sapphire (0001) substrates by metalorganic chemical vapor deposition. A growth mechanism was proposed to explain such a transition. Vertically well-aligned homogeneous nanorods with average diameters of ∼30, 45, 60, and 70nm were grown with the c-axis orientation. Raman scattering showed that the E2 (high) mode shifted to high frequency with the decrease of nanorod diameters, which revealed the dependence of nanorod diameters on the stress state. This dependence suggests a stress-driven diameter-controlled mechanism for ZnO nanorod arrays grown on sapphire (0001) substrates.
ZnO film with high crystal quality was prepared on InN/sapphire substrate by metal organic chemical vapor deposition. The diffusion of nitrogen (N) into ZnO film was investigated via Auger electron spectroscopy (AES), x-ray photoelectron spectroscopy (XPS), and low-temperature photoluminescence (LT-PL). AES revealed that some N atoms out-diffused into ZnO film after a rapid thermal annealing (RTA) process, while most of the In atoms remained in InN layers, which was confirmed by XPS. LT-PL spectra at 10 K further confirmed that N atoms diffused into the upper ZnO film and acted as acceptors after RTA. It might be an attractive way to obtain high-quality p-type ZnO:N on InN films by this thermal diffusion doping technique.
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