This paper reports a proposal for an advanced and efficient method to evaluate the pattern transfer completeness (PTC) in terms of line edge roughness (LER) by quantifying the deviations of printed patterns statistically in regards to their original designed patterns. Three substantial errors in the existing method are corrected by the proposed method with evidence from iterative examinations.With the use of identical images of complex patterns expressible in parametric forms such as Archimedean, logarithmic, and hyperbolic spirals, error corrections and efficiency improvements compared to the existing method are proven. Comprehensive studies for image operation, reference point definition, deviation acquisition, contour point creation, and LER calculation were performed. In addition, this work involves analyses of the errors in the existing method, the efficiency improvement of the proposed method, the impact of variations on point density, and the validity of the LER calculations. The results show that the proposed method not only correctly evaluates the PTC of printed patterns with on average 97.6% efficiency enhancement, with at most 37.7% correctness improvement, but also displayed operation flexibility with the controllable point density in comparison to the existing method.
The effect of the input flowrate ratio and the Reynolds numbers in range from 10 to 300 on the mixing of liquids in a T-type micromixer was examined. Linear trends of mixing efficiency change on the ratio of input flowrates and Reynolds number are approximated. The most effective mixing (the mixing coefficient reaches 0.86) was obtained at Reynolds numbers 186 and 300 and the input flowrate ratio R = 1. It is determined that with equal input flowrate ratio, as the Reynolds number increases from 10 to 300, the mixing efficiency rises sharply: from 0.2 to 0.8 (for 0.5 < R < 1). Variation of the ratio of input flowrates at low Reynolds numbers in the range from 10 to 120 can lead to a significant increase in the mixing of liquids (Re = 47, the growth mixing from 0.22 to 0.67). With Reynolds numbers 186 and 300, as the input flowrate ratio increases from 0.1 to 1, the mixing ratio rises from 0.25–0.30 to 0.85–0.90.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.