We present an atmospheric pressure ambient air plasma technique developed for technically simple treatment of inner and/or outer surfaces of plastic tubes and other hollow dielectric bodies. It is based on surface dielectric barrier discharge generating visually diffuse plasma layers along the treated dielectric surfaces using water-solution electrodes. The observed visual uniformity and measured plasma rotational and vibrational temperatures of 333 K and 2350 K indicate that the discharge can be readily applied to material surface treatment without significant thermal effect. This is exemplified by the obtained permanent surface hydrophilization of polytetrafluoroethylene tubes related to the replacement of a high fraction (more than 80%) of the surface fluorine determined by X-ray photoelectron spectroscopy. A tentative explanation of the discharge mechanism based on high-speed camera observations and the discharge current and voltage of measurements is outlined.

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Abstract:The purpose of this work was to deposit Zn-containing films on Si substrates using the commercial atmospheric pressure plasma jet "kINPen'09." In preliminary experiments Zn-containing films were deposited on the silicon substrates immersed in water solutions of Zn(NO 3 ) 2 •6H 2 O salt. The surface composition of deposited films was analyzed by the XPS (X-ray photoelectron spectroscopy) technique while the bulk composition was studied by means of XRD (X-ray diffraction) mesurements. The film thickness was measured by a profilometer. We have determined that the concentration of the zinc nitrate solution as well as changes in the deposition time resulted in a large fluctuation of the deposited film thickness. However, the successful deposition of the Zn-containing films on the Si substrate was definitely confirmed.

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Optical emission spectroscopy, fast intensified CCD imaging and electrical measurements were applied to investigate the basic plasma parameters of surface barrier discharge emerging from a conductive water electrode. The discharge was generated at the triple-line interface of atmospheric pressure argon gas and conductive water solution at the fused silica dielectrics using a sinusoidal high-voltage waveform. The spectroscopic methods of atomic line broadening and molecular spectroscopy were used to determine the electron densities and the gas temperature in the active plasma. These parameters were obtained for both applied voltage polarities and resolved spatially. Two different spectral signatures were identified in the spatially resolved spectra resulting in electron densities differing by two orders of magnitude. It is shown that two discharge mechanisms take a place: the streamer and the leader one, with electron densities of 10 14 and 10 16 cm −3 , respectively. This spectroscopic evidence is supported by the combined diagnostics of electrical current measurements and phase-resolved intensified CCD camera imaging.