2014
DOI: 10.1515/chem-2015-0020
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Deposition of Zn-containing films using atmospheric pressure plasma jet

Abstract: Abstract:The purpose of this work was to deposit Zn-containing films on Si substrates using the commercial atmospheric pressure plasma jet "kINPen'09." In preliminary experiments Zn-containing films were deposited on the silicon substrates immersed in water solutions of Zn(NO 3 ) 2 •6H 2 O salt. The surface composition of deposited films was analyzed by the XPS (X-ray photoelectron spectroscopy) technique while the bulk composition was studied by means of XRD (X-ray diffraction) mesurements. The film thickness… Show more

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Cited by 31 publications
(25 citation statements)
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“…These plasmas are interesting because of their ability to produce strongly oxidizing species (OH and O radicals, H 2 O 2 ) and UV radiation. The water based plasmas have also demonstrated their potential for cleaning, chemical grafting, and physical surface modifications of polymer materials …”
Section: Introductionmentioning
confidence: 99%
“…These plasmas are interesting because of their ability to produce strongly oxidizing species (OH and O radicals, H 2 O 2 ) and UV radiation. The water based plasmas have also demonstrated their potential for cleaning, chemical grafting, and physical surface modifications of polymer materials …”
Section: Introductionmentioning
confidence: 99%
“…As evident in Figure 7a, the high-resolution XPS spectrum of Zn2p3/2 is fitted by two peaks located at a binding energy of 1021.21 and 1022.18 eV, and can be attributed to the ZnO and Zn(OH)2, respectively [23,27,29]. It can be clearly seen in Figure 7b that the highresolution XPS spectrum of O1s is fitted by four peaks located at 530.75, 531.72 532.78, and 533.79 eV, corresponding to the Zn-O bonding of the ZnO structure, Zn(OH)2, C-O or C=O, and C-O-C, respectively [23,26,29]. The high-resolution XPS spectrum of C1s is shown in Figure 7c.…”
Section: Characterization Of Coatings On Wood By Xpsmentioning
confidence: 91%
“…In the case of a ZnO coating via the SPPS deposition method, several works [17][18][19][20][21][22][23] have reported the use of different Zn-based compounds as precursors, among which the most widely used compounds are zinc nitrate (Zn(NO 3 ) 2 •6H 2 O), zinc chloride (ZnCl 2 ), zinc acetate (Zn(OAc) 2 •2H 2 O), and zinc acetylacetonate (Zn(C 5 H 7 O 2 ) 2 •xH 2 O). However, on the basis of current knowledge, no complete investigation has been reported for ZnO thin films deposited on wood surfaces by atmospheric pressure plasma jet (APPJ) via the SPPS method.…”
Section: Introductionmentioning
confidence: 99%
“…The low temperature permits treating polymers, and the design of some plasma equipment allow it to penetrate challenging cavities, which was verified in a stack of polymer discs with openings that shaped a winding cavity [7]. Plasma technology has also been used for the deposit of films containing zinc, using a solution of zinc nitrate hexahydrate salt in water as a source of zinc [8]. The industrial application of plasma processes for medical devices has been extensively demonstrated [9,10].…”
Section: Introductionmentioning
confidence: 99%