We have realized single phase crystalline BaSi2 thin films on quartz substrate by vacuum evaporation for solar cell applications. This structure is achieved by introducing (111)-oriented poly-Si fabricated by aluminum induced crystallization as a supply layer prior to BaSi2 deposition. Raman measurements showed five characteristic peaks corresponding to [Si4] 4anions vibrations in BaSi2 for all films deposited at 400 o C and above. X-ray diffraction analysis showed that randomly-oriented orthorhombic phase of BaSi2 is achieved with no trace of secondary phases. Also, the crystal quality is enhanced at higher substrate temperatures.
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