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Numerical investigation of a gas flow through microchannels with a sharp, 90 degrees bend is carried out using Navier-Stokes (N-S) equations with the classical Maxwell first-order slip boundary condition, including the tangential gradient effect due to the wall curvature, and Smoluchowski first order temperature jump definition. The details of the flow structure near the corner are analyzed, investigating the competing effects of rarefaction and compressibility on the channel performances. The flow characteristics in terms of velocity profiles, slip velocity distribution along inner and outer wall, pressure, average Mach number along central line of the channel have been presented. The results showed that impact of the bend on the channel performances is smaller at high rarefaction levels. The behaviour of pressure and velocity away from the bend is similar to that of a straight microchannel; however, the asymmetry in the flow at the bend, with high velocities and high velocity gradients on its inner side, has a strong impact on wall slip velocities. The presence of a recirculation is detected on both the inner and outer walls of the corner for larger Reynolds. However, rarefaction may delay the onset of recirculation. It is also observed that the mass flux through a bend microchannel can even be slightly larger than that through a straight microchannel of the same length and subjected to the same pressure difference.

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