We have demonstrated a laser-produced plasma extreme ultraviolet source operating in the 6.5–6.7 nm region based on rare-earth targets of Gd and Tb coupled with a Mo/B4C multilayer mirror. Multiply charged ions produce strong resonance emission lines, which combine to yield an intense unresolved transition array. The spectra of these resonant lines around 6.7 nm (in-band: 6.7 nm ±1%) suggest that the in-band emission increases with increased plasma volume by suppressing the plasma hydrodynamic expansion loss at an electron temperature of about 50 eV, resulting in maximized emission.
A proof-of-principle experiment demonstrates the generation of radiation from the Cherenkov wake excited by an ultrashort- and ultrahigh-power pulse laser in a perpendicularly magnetized plasma. The frequency of the radiation is in the millimeter range (up to 200 GHz). The intensity of the radiation is proportional to the magnetic field intensity as expected by theory. Polarization of the emitted radiation is also detected. The difference in the frequency of the emitted radiation between these experiments and previous theory can be explained by the electrons' oscillation in the electric field of a narrow column of ions in the focal region.
We demonstrate an efficient extreme ultraviolet (EUV) source for operation at λ = 6.7 nm by optimizing the optical thickness of gadolinium (Gd) plasmas. Using low initial density Gd targets and dual laser pulse irradiation, we observed a maximum EUV conversion efficiency (CE) of 0.54% for 0.6% bandwidth (BW) (1.8% for 2% BW), which is 1.6 times larger than the 0.33% (0.6% BW) CE produced from a solid density target. Enhancement of the EUV CE by use of a low-density plasma is attributed to the reduction of self-absorption effects.
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