A new method for directly monitoring the electron beam intensity profile in a scanning electron microscope is proposed. This method employs phase lock-in technique which electronically differentiates the integrated current collected, while scanning the rocked electron beam across a knife edge and directly obtains the one-dimensional intensity distribution of the electron beam probe. The method can be employed for beam currents as low as 30 pA with the spatial resolution accuracy of ±125 Å. Electron beam diameters can be measured at higher accuracies due to the inherent improvement in the S/N ratio provided by this method. Electron beam aberrations can also be directly observed by studying the intensity profiles of the probe cross section.
This paper reports on an ultrasonic waveguide sensor for liquid level measurements using three guided wave modes simultaneously. The fundamental wave modes longitudinal L(0,1), torsional T(0,1), and flexural F(1,1) were simultaneously transmitted/received in a thin stainless steel wire-like waveguide using a standard shear wave transducer when oriented at an angle of 45° to the axis of the waveguide. Experiments were conducted in non-viscous fluid (water) and viscous fluid (castor oil). It was observed that the flexural F(1,1) wave mode showed a change in both time of flight (due to the change in velocity and dispersion effects) and amplitude (due to leakage) for different levels (0–9 cm) of immersion of the waveguide in a fluid medium. For the same level of immersion in the fluid, the L(0,1) and the T(0,1) modes show only a relatively smaller change in amplitude and no change in time of flight. The experimental results were validated using finite element model studies. The measured change in time of flight and/or the shift in central frequency of F(1,1) was related to the liquid level measurements. Multiple trials show repeatability with a maximum error of 2.5% in level measurement. Also, by monitoring all three wave modes simultaneously, a more versatile and redundancy in measurements of the fluid level inside critical enclosures of processing industries can be achieved by compensating for changes in the fluid temperature using one mode, while the level is measured using another. This ultrasonic waveguide technique will be helpful for remote measurements in physically inaccessible areas in hostile environments.
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