We demonstrate diamond-based quantum imaging of the current flow in graphene structures with submicrometer resolution.

The nitrogen vacancy (NV) center in diamond exhibits spin-dependent fluorescence and long spin coherence times under ambient conditions, enabling applications in quantum information processing and sensing 1, 2 . NV centers near the surface can have strong interactions with external materials and spins, enabling new forms of nanoscale spectroscopy 3-6 . However, NV spin coherence degrades within 100 nanometers of the surface, suggesting that diamond surfaces are plagued with ubiquitous defects 7-10 . Prior work on characterizing near-surface noise has primarily relied on using NV centers themselves as probes [7][8][9][10][11][12] ; while this has the advantage of exquisite sensitivity, it provides only indirect information about the origin of the noise. Here we demonstrate that surface spectroscopy methods and single spin measurements can be used as complementary diagnostics to understand sources of noise. We find that surface morphology is crucial for realizing reproducible chemical termination, and use these insights to achieve a highly ordered, oxygen-terminated surface with suppressed noise. We observe NV centers within 10 nm of the surface with coherence times extended by an order of magnitude.Although it is easy to place NV centers near the surface by low-energy ion implantation 8, 9 or delta-doping 7, 8 , the surface itself can host defects that lead to noise that obscures the sensing target ( Fig. 1a). We observe that coherence time degrades with proximity to the surface in numerous samples with different surface conditions ( Fig. 1b), consistent with prior studies 7, 10 , pointing to the need for new techniques to understand and control diamond surfaces. Gaining precise control over diamond surface chemistry is challenging because diamond is a chemically inert material, and also because it is hard to prepare uniform, flat diamond surfaces. Surface morphology is difficult 2 to control because diamond's hardness makes etching and polishing non-trivial. State-of-the-art diamond polishing can achieve surface roughness below 1 nm, but the resulting surface is highly strained. Plasma etching can remove this strained layer 13, 14 , but this process is highly anisotropic and therefore small differences in initial conditions can lead to dramatic differences in final morphology and termination 15, 16 (see Supplementary Information). Therefore, direct characterization of the surface is crucial for establishing that particular protocols reproducibly lead to specific, desired surface terminations.In this work, we characterize the diamond surface by correlating photoelectron spectroscopy, X-ray absorption, atomic force microscopy (AFM), and electron diffraction with measurements of NV spin decoherence and relaxation to identify and eliminate sources of noise at the surface. We find that surface roughness leads to poor NV coherence, and we observe that surface morphology changes the density of electronic defects observed with photoelectron spectroscopy, even for the same nominal chemical termination, implying that it ...

We present a study of the spin properties of dense layers of near-surface nitrogen-vacancy (NV) centres in diamond created by nitrogen ion implantation. The optically detected magnetic resonance contrast and linewidth, spin coherence time, and spin relaxation time, are measured as a function of implantation energy, dose, annealing temperature and surface treatment. To track the presence of damage and surface-related spin defects, we perform in situ electron spin resonance spectroscopy through both double electron-electron resonance and cross-relaxation spectroscopy on the NV centres. We find that, for the energy (4−30 keV) and dose (5×10 11 −10 13 ions/cm 2 ) ranges considered, the NV spin properties are mainly governed by the dose via residual implantation-induced paramagnetic defects, but that the resulting magnetic sensitivity is essentially independent of both dose and energy. We then show that the magnetic sensitivity is significantly improved by high-temperature annealing at ≥ 1100 • C. Moreover, the spin properties are not significantly affected by oxygen annealing, apart from the spin relaxation time, which is dramatically decreased. Finally, the average NV depth is determined by nuclear magnetic resonance measurements, giving ≈ 10-17 nm at 4-6 keV implantation energy. This study sheds light on the optimal conditions to create dense layers of near-surface NV centres for high-sensitivity sensing and imaging applications.