In this study, the electrical and optical properties and plasma's parameters of capacitive radio frequency (RF) discharge for the argon and hydrogen mixture at low pressure are investigated using optical emission spectroscopy (OES) and a Langmuir probe. The wavelengths of spectral lines obtained from OES are between 400 and 950 nm. By using the spectral lines and probe data, the electron temperature for every different RF power, mixture rate and flow rate are determined by the modified Boltzmann curve method. The Langmuir probe gives the electron temperature and other plasma properties for the same discharge parameters.
In this study, the characteristic properties and plasma parameters of capacitive radio frequency (RF) argon (Ar) discharge and supplementary discharge at low pressure are investigated with optical emission spectroscopy (OES). The wavelengths of spectral lines from OES are obtained between 650–900 nm. Using OES lines and related experimental data, the electron temperatures for different RF power, flow, and measurement periods are determined. Eventually, the properties of plasma including the electron temperature are identified. In addition, the numerical modelling of the discharge parameters is carried out by using the “extended” fluid model for plasma, and consistency between numerical and experimental results is discussed.
The optical properties for radiofrequency (RF) post-discharge of pure helium (He) with two different methods as capacitively and inductively have been presented using the modified Boltzmann method in comparison. Optical emission spectroscopy (OES) is often used in the diagnosis of laboratory plasma, such as gas discharge plasma. OES is a very useful method for calculating of the electron temperature in the plasma and the determination of different atoms and molecules. In this study, OES is applied for characterizations of capacitively and inductively RF He plasma at pressures between 0.62 and 2.2 mbar for newly reactor type. Plasmas are generated with an RF power generator at a frequency of 13.56 MHz and output powers of 100, 160, and 200 W. Spectra have been evaluated in the range 200–1200 nm by an optical spectrometer. At low pressure, the main spectral features reported are the wavelengths of the atomic He transitions at 388.87 and 728.13 nm. The atomic emission intensities showed a maximum in inductive system when the pressure is about 0.62 mbar. OES of capacitive discharge and inductive discharge is compared in detail. The transition for 587.56 nm is shown to be increased in time.
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