The effect of axial electrostatic forces on the rotor deflection of an axial-drive double-stator micromotor is studied with respect to the limits of stability against elastic rotor collapse using the finite-element method (FEM). Forces obtained from an electrostatic FE model have been applied to a structural FE model using the indirect coupled-field analysis approach. This technique may be applied to other MEMS structures with conducting components. A technical description is given of the design and the fabrication process of the axial-drive double-stator micromotor investigated. Two different axial rotor supports (bearing and bushing) are investigated. The results are discussed as a function of the applied voltage and rotor thickness considering polysilicon and aluminium as possible rotor materials. The effects on the stability of the rotor of supporting the rotor with an additional bushing, and of increasing the rotor thickness, are investigated quantitatively.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.