Both optical and tactile probes are often used in dimensional metrology applications, especially for roughness, form, thickness and surface profile measurements. To perform such kinds of measurements with a nanometre-level of accuracy (∼30 nm), Laboratoire National de Métrologie et d’Essais (LNE) has developed a new high-precision machine. The architecture of the machine contains a short and stable metrology frame dissociated from the supporting frame. It perfectly respects the Abbe principle. The metrology loop supports reference laser interferometers and is equipped either with an optical probe or a tactile probe of nanometric resolution and linear residuals. The machine allows in situ calibration of the measuring optical and tactile probes by comparison to the laser interferometer measurements, considered as a reference. In this paper, both architecture and operation of the LNE's high-precision profilometer are detailed. A brief comparison of the behaviour (linear residuals) of the confocal chromatic and tactile probes is presented. Optical and tactile scanning of V-grooves artefacts with 75, 24, 7.5, 2.4, 0.75 and 0.24 µm depths are illustrated and discussed. In addition, a comparison between optical, tactile and atomic force microscopy measurements on a VLSI SHS 880-QC is also performed. Finally, a comparison of an optical and tactile scanning of optical aspherical lens with a polymer coating is presented and discussed.

Chromatic confocal probes are increasingly used in high-precision dimensional metrology applications such as roughness, form, thickness and surface profile measurements; however, their measurement behaviour is not well understood and must be characterized at a nanometre level. This paper provides a calibration bench for the characterization of two chromatic confocal probes of 20 and 350 µm travel ranges. The metrology loop that includes the chromatic confocal probe is stable and enables measurement repeatability at the nanometer level. With the proposed system, the major error sources, such as the relative axial and radial motions of the probe with respect to the sample, the material, colour and roughness of the measured sample, the relative deviation/tilt of the probe and the scanning speed are identified. Experimental test results show that the chromatic confocal probes are sensitive to these errors and that their measurement behaviour is highly dependent on them.

is an open access repository that collects the work of Arts et Métiers ParisTech researchers and makes it freely available over the web where possible. a b s t r a c tIn the framework of form characterization of aspherical surfaces, European National Metrology Institutes (NMIs) have been developing ultra-high precision machines having the ability to measure aspherical lenses with an uncertainty of few tens of nanometers. The fitting of the acquired aspherical datasets onto their corresponding theoretical model should be achieved at the same level of precision. In this article, three fitting algorithms are investigated: the Limited memory-Broyden-Fletcher-Goldfarb-Shanno (L-BFGS), the Levenberg-Marquardt (LM) and one variant of the Iterative Closest Point (ICP). They are assessed based on their capacities to converge relatively fast to achieve a nanometric level of accuracy, to manage a large volume of data and to be robust to the position of the data with respect to the model. Nevertheless, the algorithms are first evaluated on simulated datasets and their performances are studied. The comparison of these algorithms is extended on measured datasets of an aspherical lens. The results validate the newly used method for the fitting of aspherical surfaces and reveal that it is well adapted, faster and less complex than the LM or ICP methods.

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Aspheric surfaces have become widely used in various fields ranging from imaging systems to energy and biomedical applications. Although many research works have been conducted to address their manufacturing and measurement, there are still challenges in form characterization of aspheric surfaces considering a large number of data points. This paper presents a comparative study of 3D measurement and form characterization of an aspheric lens using tactile and optical single scanning probing systems. The design of the LNE high precision profilometer, traceable to standard references is presented. The measured surfaces are obtained from the aforementioned system. They are characterized with large number of data points for which a suitable process chain is deployed. The form characterization of the aspheric surfaces is based on surface fitting techniques by comparing the measured surface with the design surface. A comparative study of registration methods and non-linear Orthogonal Least-Squares fitting Methods is presented. Experimental results are analyzed and discussed to illustrate the effectiveness of the proposed approaches.