Current work investigates the effect of thermal creep on the behavior of rarefied gas flow through micro/nanochannels using the direct simulation Monte Carlo method. Thermal creep effects are studied on velocity profiles, streamwise velocity and pressure, and thermal mass flow rate. The strength of thermal creep is examined at different Knudsen number, channel pressure ratio, and bulk temperature. The thermal mass flow rate variation is investigated over a wide range of flow rarefaction from the slip to free molecular regime.
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