This paper deals with the investigation of the power absorption in helicon plasma excited through a half-helix antenna driven at 13.56 MHz. The simulations were carried out by means of a code, HELIC. They were carried out by taking into account different inhomogeneous radial density profiles and for a wide range of plasma densities, from 10 cm 11 3 to 10 cm. 13 3-The magnetic field was 200, 400, 600 and 1000 G. A three-parameter function was used for generating various density profiles with different volume gradients, edge gradients and density widths. The density profile had a large effect on the efficient Trivelpiece-Gould (TG) and helicon mode excitation and antenna coupling to the plasma. The fraction of power deposition via the TG mode was extremely dependent on the plasma density near the plasma boundary. Interestingly, the obtained efficient parallel helicon wavelength was close to the anticipated value for Gaussian radial density profile. Power deposition was considerably asymmetric when the n B 0 ratio was more than a specific value for a determined density width. The longitudinal power absorption was symmetric at approximately n 10 cm , 0 11 3 = irrespective of the magnetic field supposed. The asymmetry became more pronounced when the plasma density was 10 cm. 12 3-The ratio of density width to the magnetic field was an important parameter in the power coupling. At high magnetic fields, the maximum of the power absorption was reached at higher plasma density widths. There was at least one combination of the plasma density, magnetic field and density width for which the RF power deposition at both side of the tube reached its maximum value.
In the present context, the extraction system of a helicon ion source has been simulated and constructed. Results of the ion source commissioning at up to 20 kV are presented as well as simulations of an ion beam extraction system. Argon current of more than 200 μA at up to 20 kV is extracted and is characterized with a Faraday cup and beam profile monitoring grid. By changing different ion source parameters such as RF power, extraction voltage, and working pressure, an ion beam with current distribution exhibiting a central core has been detected. Jump transition of ion beam current emerges at the RF power near to 700 W, which reveals that the helicon mode excitation has reached this power. Furthermore, measuring the emission line intensity of Ar ii at 434.8 nm is the other way we have used for demonstrating the mode transition from inductively coupled plasma to helicon. Due to asymmetrical longitudinal power absorption of a half-helix helicon antenna, it is used for the ion source development. The modeling of the plasma part of the ion source has been carried out using a code, HELIC. Simulations are carried out by taking into account a Gaussian radial plasma density profile and for plasma densities in range of 10-10 m. Power absorption spectrum and the excited helicon mode number are obtained. Longitudinal RF power absorption for two different antenna positions is compared. Our results indicate that positioning the antenna near to the plasma electrode is desirable for the ion beam extraction. The simulation of the extraction system was performed with the ion optical code IBSimu, making it the first helicon ion source extraction designed with the code. Ion beam emittance and Twiss parameters of the ellipse emittance are calculated at different iterations and mesh sizes, and the best values of the mesh size and iteration number have been obtained for the calculations. The simulated ion beam extraction system has been evaluated using optimized parameters such as the gap distance between electrodes, electrodes aperture, and extraction voltage. The gap distance, ground electrode aperture, and extraction voltage have been changed between 3 and 9 mm, 2-6.5 mm, and 10-35 kV in the simulations, respectively.
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