In order to achieve nanometer accuracies, low vibration in air spindle is vital. Some parameters affecting air spindle vibration could be mentioned as rotational speed, inlet hole diameter, air pocket geometry, air gap pressure and so on. In this study, the air pocket geometry and depth plus rotational speed are experimentally investigated. Three levels of quantity are selected for each parameter. Vibration movements were considered as experiment output. Then, experimental results were analyzed by design of experiment method. The results showed that the air spindle with an air pocket of rectangular shape and 3 mm depth at low rotational speed has minimum vibrations.
In order to achieve nanometer accuracies, the low vibration of air spindle and air table is vital. Number and size of air pockets in air spindles and air tables are important parameters in nanomachining vibrations. In this article, rotational speed as well as these parameters has been studied. Three levels are selected for each parameter and, in total, 27 experiments have been committed. Also, in this work, air pockets were rectangular. In this study, rotor considered externally which rotates about stator. Experiments were conducted with the help of a lathe machine. For vibration measurements, the VibroTest 60 was used. The results were analyzed using design of experiment method. Experimental results show that the air spindle with two air pockets with 200 mm2 area at a low rotational speed has minimum vibrations.
In this study, factors that affect air spindle vibrations have been investigated experimentally. In order to achieve nanometer accuracies, the low vibration of air spindle is vital. Shape, size, depth, number of air pockets, and rotational speed of air spindles are important parameters influencing nanomachining vibrations. A total of 3 levels are selected for each parameter and in total 243 experiments have been performed. In this study, the rotor is considered externally which rotates about a central stator. Experiments were committed by the help of a lathe machine. For vibration measurements, the VibroTest 60 has been used. Results have been analyzed using the Design of Experiment method. From the results, it has been analyzed that the air spindle with 2 circular/rectangular air pockets and with 300 mm2 area and 3 mm depth at a low rotational speed has minimum vibrations.
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