~1 1 .~ at this point and decrease exponentially with distance downstream fror the discharge. The electron energy diatribution functions are non-Uaxwellian and below 3 mtorr more closely follow a Druyvesteyn distribution with average energies of 5-8.5eV. Ion energies to a grounded substrate are typically 10-25eV with fev if any high energy (>25eV) ions.
J. Asmussen andM. Dahimene, J.
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