In this study, we examined the temperature characteristics of a Lamb wave propagating on a thin quartz crystal substrate. Consequently, we found a new cut where frequency hardly changes with temperature. The steady frequency-temperature characteristics show a quadric curve and the third curve. The analytical results and experimental results for the temperature characteristics of a Lamb wave propagating on an AT cut quartz are compared and discussed in this study. The agreement between the theoretical and experimental results shows that the analytical results of this study were reliable.
SUMMARYPlate wave (Lamb wave) propagation in an extremely thin quartz substrate is analyzed. A cut angle is sought that exhibits an ultrastable temperature dependence of the frequency characteristics so that the frequency changes little with temperature. Highly stable temperature characteristics of the frequency indicating second-and third-order curves are obtained. Theoretical and experimental investigations of the temperature characteristics of the frequency of Lamb waves propagating in an AT-cut quartz substrate indicate excellent agreement between the two, confirming that the reliability of the results of the present analysis is high.
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