In this work, the coupled thickness-shear and flexural vibrations of the LiTaO 3 piezoelectric plates excited by lateral electric fields produced by surface electrodes under viscous liquid loadings are modeled and analyzed based on Mindlin's plate theory. The influences of liquid properties on the admittance characteristics and frequency shifts of the piezoelectric bulk acoustic wave devices operate in the lateral field excitation (LFE) mode are examined. In addition, the effects of the structure parameters, such as the electrode gap width, electrode/plate mass ratio and the electrode width, on the frequency sensitivity are investigated. It is shown that with the increasing electrode/plate mass ratio R, the sensitivities of the device on liquid viscosity and density increase first and then decrease, there is a maximal sensitivity when R is with a certain value. The varying trends of the frequency shifts with various liquid properties and sensitivities with various structural parameters are verified by the FEM simulations. The results are crucial to obtain good vibration characteristics and sensitivities for liquid-phase LFE piezoelectric sensors by using LiTaO 3 piezoelectric crystals.
In the present study, pseudo lateral-field-excitation (LFE) bulk acoustic wave characteristics on LGT crystals are investigated to increase the sensitivity of LFE devices on the liquid characteristic variations. The cut orientation of LGT crystals for pseudo-LFE is investigated and verified experimentally. For an LFE device in the pseudo-LFE mode, the thickness shear mode wave is excited by the thickness field rather than the lateral field. The present work shows that when the (yxl) 13.8° LGT plate is excited by the electric field parallel to the crystallographic axis x, it operates in the pseudo-LFE mode. Moreover, characteristics of devices including the sensitivity and impedance are investigated. The present work shows that sensitivity of LFE devices to variation of the conductivity and permittivity of the aqueous solution are 9 and 3.2 times higher than those for AT-cut quartz crystal based devices, respectively. Furthermore, it has been found that the sensitivity of the LGT LFE sensor to liquid acoustic viscosity variations is 1.4 times higher than the one for the AT-cut quartz sensor. The results are a critical basis of designing high-performance liquid phase sensors by using pseudo-LFE devices.
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