Optical encoders are widely used to detect the position, angle or speed in precise control systems. A rotary optical encoder mainly comprises an optical sensor and an optical grating element with a fine grating pitch. In order to improve the resolution of rotary optical encoders, the grating pitch in the optical grating element should be reduced as small as possible. That is, the pulse per revolution (ppr) in the optical grating element must be increased markedly. However, an optical grating element having over 10,000 ppr is difficult to achieve by traditional methods. In this paper, a novel method is proposed and demonstrated to replicate an optical grating element with a high ppr. Furthermore, the tiny signals generated from fine grating pitches in the optical grating element have been also measured by using a conventional optical pickup head.
Along with the development of high definition televisions (HD-TVs), some high density optical discs are demanded to have a capacity of up to 25 Gbytes on a single layer at a single surface. The capacity on single layer may even reach up to 100 Gbytes in the near future, which requires the size of recording to be minimized to less than 100 nm. In this study, ultra high resolution patterns (<100 nm) formation by conventional laser beam recorder using the inorganic spin-coatable photoresist and without additional development or etching process is demonstrated. The recording spot size of laser beam recorder (LBR) can be reduced effectively by using this spin coatable inorganic photoresist.
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