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A methodology for topology optimization of fully-coupled electro-mechanical systems is developed in this study, considering non-matching meshes. In order to develop a technique for parameterizing the electrostatic mesh, based on the solid-void state of the structural elements, the case of electrostatic forces is discussed in detail. High-fidelity analysis models are used in both the structural and electrostatic fields. The parameterization scheme is successfully applied to the design of a force inverter.Keywords: Topology optimization, Electro-mechanical, Non-matching meshes, MEMS IntroductionSince its modern inception, topology optimization has become an advanced design tool for many engineering applications. One area that has been largely unaccounted for is the development of topology optimization schemes for fully coupled multi-field systems that interact through a surface or interface. Examples of this type of interaction include fluid-structure and electro-mechanical. The coupling of the physical fields occur through stresses generated on the structure by the fluid and electrostatic fields, and the displacement of the structure. In this study, the topology optimization of fully coupled electro-mechanical systems is explored, in particular for the case in which the structural and electrostatic meshes do not match.Electro-mechanical systems are an ideal application for topology optimization due to the development of a class of devices called micro-electro-mechanical systems (MEMS). Since the first surface micromachined device was developed by Howe and Muller [2] in the early 1980s, MEMS have become essential components of numerous applications, such as medical devices, automobiles, locking systems, and communications devices, among others. MEMS are used predominantly for sensing and actuation applications and allow for miniaturization at low cost. The reason that MEMS are an ideal application for topology