To achieve high throughput and efficiency, semiconductor photolithography machines need an actuation system that can meet high acceleration and precision demands on the nanoscale. One available solution is the reluctance actuator, which provides higher acceleration and force output than the standard Lorentz actuator. A floating stage with air-bearings is used to eliminate friction in the photolithography process; however, vibration transfer is not entirely eliminated, leading to potential misalignment and asymmetries between the actuator elements. With asymmetrical offsets between mover elements, the output force can be greatly affected. This paper shows a method for estimating the force of various asymmetrical cases for the C-core reluctance actuator. Analytical models are developed and further improved through polynomial curve fitting using precomputed finite element simulation results from Comsol Multiphysics (COMSOL) to achieve more optimal solutions. An experiment verified the results of the force estimation equations, which were within [Formula: see text] for different cases of asymmetric air gaps. This contribution will lead to a design for a control system that will overcome the issue of asymmetries or other altered states.
This paper investigates the effect of the flux’s mean path length (MPL) on the reluctance actuator’s analytical model. It determines the circumstances where the model neglecting the MPL is valid. The analysis is carried out for both C-Core and E-Core reluctance actuators; the analytical results are calculated by using MATrix LABoratory and then validated against a finite element model simulation by using COMputer SOLution Multiphysics. In addition, the experimental results of the magnetic force of C-Core and E-Core reluctance actuators are presented and compared with the analytical model. The comparison is obtained under different input currents and air gaps for two different ferromagnetic materials. It can be concluded that the analytical model is valid only for air gaps with a relatively high air gap displacement and for small air gaps, considering the MPL is necessary for accurate results. This means that whenever the reluctance actuator is proposed for high-precision motion system applications, it is essential that the analysis takes into account the effect of the MPL.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.