Free-standing aligned carbon nanotubes have previously been grown above 700°C on mesoporous silica embedded with iron nanoparticles. Here, carbon nanotubes aligned over areas up to several square centimeters were grown on nickel-coated glass below 666°C by plasma-enhanced hot filament chemical vapor deposition. Acetylene gas was used as the carbon source and ammonia gas was used as a catalyst and dilution gas. Nanotubes with controllable diameters from 20 to 400 nanometers and lengths from 0.1 to 50 micrometers were obtained. Using this method, large panels of aligned carbon nanotubes can be made under conditions that are suitable for device fabrication.
Highly-oriented, multi-walled carbon nanotubes were grown on polished polycrystalline and single crystal nickel substrates by plasma enhanced hot filament chemical vapor deposition at temperatures below 666°C. The carbon nanotubes range fiom 10 to 500 nm in diameter and 0.1 to 50 pm in length depending on growth conditions. Acetylene is used as the carbon source for the growth of the carbon nanotubes and ammonia is used for dilution gas and catalysis. The plasma intensity, acetylene to ammonia gas ratio and their flow rates, etc. affect the diameters and uniformity of the carbon nanotubes. [2]. Nanotube alignment is particularly important to enable both fundamental studies and applications, such as flat panel displays, vacuum microelectronics, chargeable batteries, etc. However, only one report exists on the growth of aligned carbon nanotubes by thermal decomposition of acetylene in nitrogen gas at temperature above 700°C on mesoporous silica containing iron nanoparticles [6] before our report on growth of large arrays of well-aligned carbon nanotubes on glass [16]. Here we report the growth of highly-oriented, multi-walled carbon nanotubes on nickel substrates at low temperatures by the same method (plasma enhanced hot tungsten-filament chemical vapor deposition) described in our previous paper [16]. The motivation to grow carbon nanotubes on Ni substrates is for the applications of using carbon nanotubes as battery electrodes and energy storage. We use acetylene (C2H2) to provide carbon for the growth of the carbon nanotubes and ammonia (NH3) gas for both dilution gas and catalysis. The catalytic role of ammonia is discussed in our previous paper [ 161.The base pressure of the deposition chamber is < 6 x Torr. We grew carbon nanotube films in a pressure of 1 -20 Torr maintained by flowing acetylene and ammonia gases with a total flow rate of 120 -200 sccm. We varied the acetylene-to-ammonia volume ratio fiom 1 : 2 to 1 : 10 for different experimental runs. Both polished polycrystalline and single-crystal Ni substrates were used. After stabilizing the working pressure, the tungsten filament coil powered by a DC source and the plasma-generator were turned on to generate heat and plasma. Under the present experimental set-up, the temperature of samples is estimated to be below 666 "c (which is the strain point of the display glass provided by Corning Inc.) since the display glass sit side by side with the Ni did not show any noticeable deformation after the experiments [ 161 and also Ni is not red-hot by visual observation. Growth durations were fiom 10 min to 5 h depending on the desired carbon nanotube lengths. Samples were examined by scanning electron microscopy (SEM, Hitachi S-4000) to measure tube lengths, diameters, site distributions, alignment, density and uniformity. High-resolution transmission electron microscopy (TEN was used to determine 2 the microstructure of individual tubes. Samples were also examined by x-ray diffraction, Raman spectroscopy, and x-ray photoemission spectroscopy to stud...
Epitaxial thin films of Ba2YCu3O7−x (BYC) were prepared on (001) LaAlO3 single-crystal substrates by metalorganic deposition of metal trifluoroacetate precursors. This is an ex situ process that requires high-temperature annealing in a humid atmosphere to produce stoichiometric BYC thin films. The chemically derived superconducting films were found to have high critical temperatures and high current densities when crystallized under low-oxygen partial pressures. Superconducting films of 70 nm thickness with zero-field critical current densities greater than 5×106 A/cm2 at 77 K and zero resistance at 92 K were prepared by annealing at 780 and 830 °C in 2.5 × 10−4–1 × 10−3 atm oxygen furnace atmospheres. As the film thickness was increased, the superconducting properties and surface smoothness of the films tended to degrade. This behavior was consistent with a microstructural model in which the films are composed of a dense slab of c-axis normal BYC near the film/substrate interface with the overlying material dominated by grains with c-axis in-plane crystallographic orientation. The transport Jc fell to 2–3×106 A/cm2 for films of 200–250-nm thickness annealed at 780 °C in 1 × 10−3 atm oxygen. As the P(O2) was raised to 0.032 atm at 780 °C, for films of the same thickness, the Jc at 77 K decreased to 0.7 × 106–1 × 106 A/cm2 and the Tc(R = 0) dropped to 89 K. Increasing the furnace P(O2) was also found to degrade the crystalline quality of the films, as characterized by ion channeling Rutherford backscattering spectroscopy.
The thermal stability in vacuum of amorphous tetrahedrally coordinated carbon (a-tC) films grown on Si has been assessed by in situ Raman spectroscopy. Films were grown in vacuum on room-temperature substrates using laser fluences of 12, 22, and 45 J/cm2 and in a background gas of either hydrogen or nitrogen using a laser fluence of 45 J/cm2. The films grown in vacuum at high fluence (≳20J/cm2) show little change in the a-tC Raman spectra with temperature up to 800 °C. Above this temperature the films convert to glassy carbon (nanocrystalline graphite). Samples grown in vacuum at lower fluence or in a background gas (H2 or N2) at high fluence are not nearly as stable. For all samples, the Raman signal from the Si substrate (observed through the a-tC film) decreases in intensity with annealing temperature indicating that the transparency of the a-tC films is decreasing with temperature. These changes in transparency begin at much lower temperatures (∼200 °C) than the changes in the a-tC Raman band shape and indicate that subtle changes are occurring in the a-tC films at lower temperatures.
A need exists for low-cost coated-conductor fabrication methods for applications in magnet and electric-power technologies. We demonstrate high-critical current density (Jc) YBa2Cu3O7−δ (YBCO) films grown on Nb-doped SrTiO3 (Nb:STO) buffered Ni(100) tapes. All buffer and superconductor layers are deposited using solution chemistry. A 50 nm thick Nb:STO seed layer on Ni(100) acts as a template for the growth of subsequent thicker layers of Nb:STO. Nb doping improves the electrical conductivity and oxygen diffusion barrier properties of STO. YBCO grows heteroepitaxially directly on this buffer layer, resulting in a transport Jc(77 K)=1.3 MA/cm2.
We grow multiwall carbon nanotube (CNT) films using thermal chemical vapor deposition at atmospheric pressure using a mixture of acetylene and nitrogen from a 4-nm-thick Ni film catalyst. CNTs are characterized using electron microscopy and Rutherford backscattering spectrometry. CNTs grown with this method are extremely uniform in diameter, both throughout the sample and within the lengths of individual tubes. Nanotube outer diameters, ranging from 5–350 nm, and the total deposition of carbon material, increase exponentially with growth temperature from 630 °C–790 °C.
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