Since the late 1980s there have been spectacular developments in micromechanical or microelectro-mechanical (MEMS) systems which have enabled the exploration of transduction modes that involve mechanical energy and are based primarily on mechanical phenomena. As a result an innovative family of chemical and biological sensors has emerged. In this article, we discuss sensors with transducers in a form of cantilevers. While MEMS represents a diverse family of designs, devices with simple cantilever configurations are especially attractive as transducers for chemical and biological sensors. The review deals with four important aspects of cantilever transducers: (i) operation principles and models; (ii) microfabrication; (iii) figures of merit; and (iv) applications of cantilever sensors. We also provide a brief analysis of historical predecessors of the modern cantilever sensors.

The development of quantitative, highly sensitive surface-enhanced Raman spectroscopy (SERS) substrates requires control over size, shape, and position of metal nanoparticles. Despite the fact that SERS has gained the reputation as an information-rich spectroscopy for detection of many classes of analytes, in some isolated instances down to the single molecule detection limit, its future development depends critically on techniques for nanofabrication. Herein, an unconventional nanofabrication approach is used to produce efficient SERS substrates. Metallic nanopatterns of silver disks are transferred from a stamp onto poly(dimethysiloxane) (PDMS) to create nanocomposite substrates with regular periodic morphologies. The stamp with periodic arrays of square, triangular, and elliptical pillars is created via electron beam lithography (EBL) of ma-N 2403 resist. A modified cyclodextrin is thermally evaporated onto the stamp to overcome the adhesive nature of the EBL resist and to function as a releasing layer. Subsequently, Ag is physically vapor deposited onto the stamp at a controlled rate and thickness and used directly for nanotransfer printing (nTP). Stamps, substrates, and the efficiency of the nTP process were explored by scanning electron microscopy. Transferred Ag nanodisk-PDMS substrates are studied by SERS using Rhodamine 6G as the probe analyte. There are observed optimal conditions involving both Ag and cyclodextrin thickness. The SERS response of metallic nanodisks of various shapes and sizes on the original stamp is compared to the corresponding nTP created substrates with similar trends observed. Limits of detection for crystal violet and Mitoxantrone are approximately 10(-8) and 10(-9) M, respectively. As an innovative feature of this approach, we demonstrate that physical manipulation of the PDMS post-nTP can be used to alter morphology, e.g., to change internanodisk spacing. Additionally, stamps are shown to be reusable after the nTP process, adding the potential to scale-up regular morphology substrates by a stamp-and-repeat methodology.

These highly sensitive sensors can respond to factors ranging from changing mass to local temperature variations.

Silicon nanowire and nanopillar structures have drawn increased attention in recent years due in part to their unique optical properties. Herein, electron beam lithography combined with reactive-ion etching is used to reproducibly create individual silicon nanopillars of various sizes, shapes, and heights. Finite difference time domain analysis predicts local field intensity enhancements in the vicinity of appropriately sized and coaxially illuminated silicon nanopillars of approximately 2 orders of magnitude. While this level of enhancement is modest when compared to plasmonic systems, the unique advantage of the silicon nanopillar resonators is that they enhance optical fields in substantially larger volumes. By analyzing experimentally measured strength of the silicon Raman phonon line (500 cm(-1)), it was determined that nanopillars produced local field enhancements that are consistent with these predictions. Additionally, we demonstrate that a thin layer of Zn phthalocyanine on the nanopillar surface with a total amount of <30 attomoles produced prominent Raman spectra, yielding enhancement factors (EFs) better than 2 orders of magnitude. Finally, silicon nanopillars of cylindrical and elliptical shapes were labeled with different fluorophors and evaluated for their surface-enhanced fluorescence (SEF) capability. The EFs derived from analysis of the acquired fluorescence microscopy images indicate that silicon nanopillar structures can provide enhancements comparable or even stronger than those typically achieved using plasmonic SEF structures without the limitations of the metal-based substrates, such as fluorescence quenching and an insufficiently large probe volume. It is anticipated that dense arrays of silicon nanopillars will enable SEF assays with extremely high sensitivity, while a broader impact of the reported phenomena is anticipated in photovoltaics, subwavelength light focusing, and fundamental nanophotonics.

A key element to improve the analytical capabilities of surface-enhanced Raman spectroscopy (SERS) resides in the performance characteristics of the SERS-active substrate. Variables such as shape, size, and homogeneous distribution of the metal nanoparticles throughout the substrate surface are important in the design of more analytically sensitive and reliable substrates. Electron-beam lithography (EBL) has emerged as a powerful tool for the systematic fabrication of substrates with periodic nanoscale features. EBL also allows the rational design of nanoscale features that are optimized to the frequency of the Raman laser source. In this work, the efficiency of EBL fabricated substrates are studied by measuring the relative SERS signals of Rhodamine 6G and 1,10-phenanthro-line adsorbed on a series of cubic, elliptical, and hexagonal nanopatterned pillars of ma-N 2403 directly coated by physical vapor deposition with 25 nm films of Ag or Au. The raw analyte SERS signals, and signals normalized to metal nanoparticle surface area or numbers of loci, are used to study the effects of nanoparticle morphology on the performance of a rapidly created, diverse collection of substrates. For the excitation wavelength used, the nanoparticle size, geometry, and orientation of the particle primary axis relative to the excitation polarization vector, and particularly the density of nanoparticles, are shown to strongly influence substrate performance. A correlation between the inverse of the magnitude of the laser backscatter passed by the spectrometer and SERS activities of the various substrate patterns is also noted and provides a simple means to evaluate possible efficient coupling of the excitation radiation to localized surface plasmons for Raman enhancement.

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It is shown that the performance of microcantilver-based chemical sensors in a liquid environment is affected by altering cantilever surface morphology and receptor phase type and thickness. Self-assembled monolayers of thiolated beta-cyclodextrin (HM-beta-CD) and thin films of vapor-deposited heptakis (2,3-O-diacetyl-6-O-tertbutyl-dimethylsilyl)-beta-cyclodextrin (HDATB-beta-CD) were studied on smooth and nanostructured (dealloyed) gold-coated microcantilever surfaces. The dealloyed surface contains nanometer-sized features that enhance the transduction of molecular recognition events into cantilever response, as well as increase film stability for thicker films. Improvements in the limits of detection of the compound 2,3-dihydroxynaphthalene as great as 2 orders of magnitude have been achieved by manipulating surface morphology and film thickness. The observed response factors for the analytes studied varied from 0.02-604 nm/ppm, as determined by cantilever deflection. In general, calibration plots for the analytes were linear up to several hundred nanometers in cantilever deflections.

A method to stabilize silver surface-enhanced Raman spectroscopy (SERS) substrates for in situ, high-temperature applications is demonstrated. Silver island films grown by thermal evaporation were coated with a thin layer (from 2.5 to 5 nm) of alumina by atomic layer deposition (ALD), which protects and stabilizes the SERS-active substrate without eliminating the Raman enhancement. The temporal stability of the alumina-coated silver island films was examined by measurement of the Raman intensity of rhodamine 6G molecules deposited onto bare and alumina-coated silver substrates over the course of 34 days. The coated substrates showed almost no change in SERS enhancement, while the uncoated substrates exhibited a significant decrease in Raman intensity. To demonstrate the feasibility of the alumina-coated silver substrate as a probe of adsorbates and reactions at elevated temperatures, an in situ SERS measurement of calcium nitrate tetrahydrate on bare and alumina-coated silver was performed at temperatures ranging from 25 to 400 • C. ALD deposition of an ultrathin alumina layer significantly improved the thermal stability of the SERS substrate, thus enabling in situ detection of the dehydration of the calcium nitrate tetrahydrate at an elevated temperature. Despite some loss of Raman signal, the coated substrate exhibited greater thermal stability compared to the uncoated substrate. These experiments show that ALD can be used to synthesize stable SERS substrates capable of measuring adsorbates and processes at high temperature.