We present a silicon microring resonator with a lithium niobate top cladding and integrated tuning electrodes. Submicrometer thin films of z-cut lithium niobate are bonded to silicon microring resonators via benzocyclobutene. Integrated electrodes are incorporated to confine voltage controlled electric fields within the lithium niobate thin film. The electrode design utilizes thin film metal electrodes and an optically transparent electrode wherein the silicon waveguide core serves as both an optical waveguide medium and as a conductive electrode medium. The hybrid material system combines the electro-optic functionality of lithium niobate with the high index contrast of silicon waveguides, enabling compact low tuning voltage microring resonators. Optical characterization of fabricated devices results in a measured loaded quality factor of 11,500 and a free spectral range of 7.15 nm in the infrared. The demonstrated tunability is 12.5 pm/V, which is over an order of magnitude greater than electrode-free designs.
The continued convergence of electronics and photonics on the chip scale can benefit from the voltage control of optical polarization for applications in communications, signal processing and sensing. It is challenging, however, to electrically manipulate the polarization state of light in planar optical waveguides. Here we introduce out-of-plane optical waveguides, allowing access to Berry's phase, a quantum-mechanical phenomenon of purely topological origin. As a result, electrically tunable optical polarization rotation on the chip scale is achieved. Devices fabricated in the silicon-on-insulator material platform are not limited to a single static polarization state. Rather, they can exhibit dynamic tuning of polarization from the fundamental transverse electric mode to the fundamental transverse magnetic mode. Electrical tuning of optical polarization over a 19 dB range of polarization extinction ratio is demonstrated with less than 1 dB of conversion loss at infrared wavelengths. Compact system architectures involving dynamic control of optical polarization in integrated circuits are envisioned.
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