In this paper, a SOI-MEMS (silicon on insulator- micro electro mechanical system) pizeoresistive atmosphere pressure sensor is presented using anodic bonding. Differently from the prevailing fabrication process of silicon piezoresistive pressure sensor: the device layer monocrystalline of SOI silicon wafer is used as the strain gauge with a simple deep etching process; and the SiO2 layer of SOI silicon wafer as the insulator between strain gauge and substrate. The whole fabrication processes of the designed sensor are very simple, and can reduce the cost of sensor. The Pressure-Voltage characteristic test results suggest a precision within 0.14% in linear fitting. It is shown that the temperature coefficient is 2718ppm/°C from the Typical temperature curve of the pressure sensors.
This paper addresses the determination of aldehyde group (% of dialdehyde units) in dialdehyde cellulose (DACs) oxidized from bacterial cellulose (BC). With 4 determination methods, the oxidation degrees of DACs were studied: Automatic potential titration method through Schiff base reaction, Acid-base titration in Cannizzaro reaction, Metaperiodate consumption determination, and Measurement of amino nitrogen content in DAC derivatives. By comparing determination results of these methods, we found out the proper way suitable for this metaperiodate oxidation system of BC to measure the dialdehyde unit content of the DACs.
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