Tunable metasurfaces enable dynamical control of the key constitutive properties of light at a subwavelength scale. To date, electrically tunable metasurfaces at near-infrared wavelengths have been realized using free carrier modulation, and switching of thermo-optical, liquid crystal and phase change media. However, the highest performance and lowest loss discrete optoelectronic modulators exploit the electro-optic effect in multiple-quantum-well heterostructures. Here, we report an all-dielectric active metasurface based on electro-optically tunable III–V multiple-quantum-wells patterned into subwavelength elements that each supports a hybrid Mie-guided mode resonance. The quantum-confined Stark effect actively modulates this volumetric hybrid resonance, and we observe a relative reflectance modulation of 270% and a phase shift from 0° to ~70°. Additionally, we demonstrate beam steering by applying an electrical bias to each element to actively change the metasurface period, an approach that can also realize tunable metalenses, active polarizers, and flat spatial light modulators.

We report an array-level inverse design approach to optimize the beam steering performance of active metasurfaces, thus overcoming the limitations posed by nonideal metasurface phase and amplitude tuning. In contrast to device-level topology optimization of passive metasurfaces, the outlined system-level optimization framework relies on the electrical tunability of geometrically identical nanoantennas, enabling the design of active antenna arrays with variable spatial phase and amplitude profiles. Based on this method, we demonstrate high-directivity, continuous beam steering up to 70° for phased arrays with realistic tunable antenna designs, despite nonidealities such as strong covariation of scattered light amplitude with phase. Nonintuitive array phase and amplitude profiles further facilitate beam steering with a phase modulation range as low as 180°. Furthermore, we use the device geometries presented in this work for experimental validation of the system-level inverse design approach of active beam steering metasurfaces. The proposed method offers a framework to optimize nanophotonic structures at the array level that is potentially applicable to a wide variety of objective functions and actively tunable metasurface antenna array platforms.

Metasurfaces tune polarization In photonic systems, the polarization state of light is typically manipulated with bulky components based on dielectrics and liquid crystals. Active metasurfaces now provide the possibility of shrinking the size of these components to the nanoscale. Biswas et al . demonstrate an active nanophotonic structure capable of versatile electro-optic polarization conversion. Using trilayer black phosphorus sandwiched between electrical gates forming a cavity, they show that the polarization state of light across telecommunication wavelengths can be electrically switched. Such control can be useful for a number of applications in communications, imaging, and beam steering where the wavefront of the propagating light can be actively manipulated. —ISO

Black phosphorus (BP) offers considerable promise for infrared and visible photonics. Efficient tuning of the bandgap and higher subbands in BP by modulation of the Fermi level or application of vertical electric fields has been previously demonstrated, allowing electrical control of its above-bandgap optical properties. Here, we report modulation of the optical conductivity below the bandgap (5 to 15 μm) by tuning the charge density in a two-dimensional electron gas induced in BP, thereby modifying its free carrier–dominated intraband response. With a moderate doping density of 7 × 1012 cm−2, we were able to observe a polarization-dependent epsilon-near-zero behavior in the dielectric permittivity of BP. The intraband polarization sensitivity is intimately linked to the difference in effective fermionic masses along the two crystallographic directions, as confirmed by our measurements. Our results suggest the potential of multilayer BP to allow new optical functions for emerging photonics applications.

In recent years, active metasurfaces have emerged as a reconfigurable nanophotonic platform for the manipulation of light. Here, application of an external stimulus to resonant subwavelength scatterers enables dynamic control over the wavefront of reflected or transmitted light. In principle, active metasurfaces are capable of controlling key characteristic properties of an electromagnetic wave, such as its amplitude, phase, polarization, spectrum, and momentum. A ‘universal’ active metasurface should be able to provide independent and continuous control over all characteristic properties of light for deterministic wavefront shaping. In this article, we discuss strategies for the realization of this goal. Specifically, we describe approaches for high performance active metasurfaces, examine pathways for achieving two-dimensional control architectures, and discuss operating configurations for optical imaging, communication, and computation applications based on a universal active metasurface.