One of the remaining challenges in the field of portable electronics is the miniaturization of lithium-ion batteries. To prepare all-solid-state batteries with a sufficient high storage capacity it is vital to prepare high quality thin films for battery stacks on 3D-structured substrates. A remote plasma atomic layer deposition (ALD) process has therefore been developed for LiCoO2 which can serve as a cathode material. A combination of CoCp2 as cobalt precursor, LiOtBu as lithium precursor and O2 plasma as oxidant source was used to create super-cycles to deposit LiCoO2 from Co3O4 and Li2CO3 cycles. The thin films were deposited at a temperature of 325°C and showed linear growth with a rate of 0.06 nm/cycle. After annealing the samples at 700°C for 6 minutes high temperature phase LiCoO2 was obtained, as was demonstrated by XRD and Raman spectroscopy. A new procedure was proposed to obtain the composition of all three chemical elements in the LiCoO2 films. Elastic Backscattering Spectroscopy (EBS) measurements turned out to be very convenient and reliable to obtain the quantities of all chemical elements, including lithium. Moreover, the ALD-deposited LiCoO2 thin film electrodes were electrochemically characterized, revealing good electrochemical performance. To the best of our knowledge this paper provides the first evidence that electrochemically active LiCoO2 can be deposited by ALD.
Document VersionPublisher's PDF, also known as Version of Record (includes final page, issue and volume numbers)Please check the document version of this publication:• A submitted manuscript is the author's version of the article upon submission and before peer-review. There can be important differences between the submitted version and the official published version of record. People interested in the research are advised to contact the author for the final version of the publication, or visit the DOI to the publisher's website.• The final author version and the galley proof are versions of the publication after peer review.• The final published version features the final layout of the paper including the volume, issue and page numbers. Link to publication General rightsCopyright and moral rights for the publications made accessible in the public portal are retained by the authors and/or other copyright owners and it is a condition of accessing publications that users recognise and abide by the legal requirements associated with these rights.• Users may download and print one copy of any publication from the public portal for the purpose of private study or research.• You may not further distribute the material or use it for any profit-making activity or commercial gain • You may freely distribute the URL identifying the publication in the public portal ? Take down policyIf you believe that this document breaches copyright please contact us providing details, and we will remove access to the work immediately and investigate your claim. Nanostructuring is targeted as a solution to achieve the improvements required for implementing Li-ion batteries in a wide range of applications. These applications range in size from electrical vehicles down to microsystems. Atomic layer deposition (ALD) could be an enabling technology for nanostructured Li-ion batteries as it is capable of depositing ultrathin films (1-100 nm) in complex structures with precise growth control. The potential of ALD is reviewed for three battery concepts that can be distinguished, i.e., particle-based electrodes, 3D-structured electrodes, and 3D all-solid-state microbatteries. It is discussed that a large range of materials can be deposited by ALD and recent demonstrations of battery improvements by ALD are used to exemplify its large potential.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.
hi@scite.ai
10624 S. Eastern Ave., Ste. A-614
Henderson, NV 89052, USA
Copyright © 2024 scite LLC. All rights reserved.
Made with 💙 for researchers
Part of the Research Solutions Family.