The conditions of the detection of nitro compounds vapors was investigated using the trinitrotoluene as an example. The detection method consists of pyrolysis and later registration by the MIS-sensor of gaseous products of thermal decomposition . It was shown that the offered method allows to achieve the detection limit of 1·10-12 g/cm3 (particles – 1 ng) with respect to the vapors of trinitrotoluene.
This paper presents a verification of technology aspects for improvement of field effect capacity type gas sensor parameters by using laser micromilling technique for fabrication ceramic surface mounting device (SMD) package and microheater for sustentation working temperature of metal-insulator-semiconductor structure (MIS structure). Innovative claims include: demonstration of flexible opportunities for new digital fabrication process flows based on laser micromilling tech: fast design of SMD sensor 3-D model, flexible changing topology of microheater, thick and thin film technology combination for reducing of power consumption. The results show possibility to fast fabrication functional sensor in customer ceramic SMD package with base 9x9 mm with twice reduced power consumption and improving mechanical properties compare with classical metal-glass microelectronic packages using before for such type sensors.
A prototype of a nitro compound vapor and trace detector, which uses the pyrolysis method and a capacitive gas sensor based on the metal–insulator–semiconductor (MIS) structure type Pd–SiO2–Si, was developed and manufactured. It was experimentally established that the detection limit of trinitrotoluene trace for the detector prototype is 1 × 10−9 g, which corresponds to concentration from 10−11 g/cm3 to 10−12 g/cm3. The prototype had a response time of no more than 30 s. The possibility of further improving the characteristics of the prototype detector by reducing the overall dimensions and increasing the sensitivity of the MIS sensors is shown.
A simple method is demonstrated for hydrogen concentrations measurement directly in transformer oil and in the gas space above it use a highly sensitive (at the level of units and fractions of ppm) gas sensor based on a metal-insulator-semiconductor capacitive structure (MIS sensor). The results obtained can be used in online monitoring systems and predicting the power transformers integral performance, in particular those that have been put into operation long ago, by tracking slow and invisible at the initial stage aging processes of current-carrying connections and structural elements.
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