In this paper we demonstrate that two-color laser-enhanced ionization (LEI) spectroscopy in flamescan be used for detecting impurities at a sub-ppm level in GaAs. Six elements were investigated(Co, Cr, Fe, In, Mn, Ni), and the content could be determined for three of them (Cr, Fe, Ni), while only an upperlimit below ppm could be given for the other three. The analysis was performed on the bulk material whichwas dissolved in acid and further diluted. In the diluted solution, the detection limits were of the same orderas in pure water solutions. Spectral interferences have been corrected for by using a background correctionmethod, which is performed without scanning the lasers. Furthermore, we discuss the applicability of LEI inflame and graphite furnace to samples with various impurity elements, matrices, and total amounts of sampleavailable for analysis.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.