Carrier transport in titanylphthalocyanine (TiOPc) thin films was studied. TiOPc thin films of various crystallinities were prepared by vacuum evaporation at substrate temperature varying from -160 to 20° C. The film deposited at the substrate temperature of 20° C was polycrystalline, while the films deposited at lower substrate temperatures were amorphous. The resistivity perpendicular to the film plane was lower than that parallel to the film plane for the polycrystalline TiOPc films. The difference in the resistivities between perpendicular and parallel to the film plane decreased with a decrease in the film crystallinity. A molecular configuration model for the TiOPc thin films, which explains the anisotropy of the film resistivity, has been proposed. In order to validate the model, the carrier mobility in the TiOPc thin films was determined by time-of-flight measurements.
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