Carbon-doped BN (BNC) membrane was fabricated by low pressure chemical vapor deposition (LPCVD) at a high temperature (750°C). Here, CH3NH2 was used as the reactive gas instead of NH3. The newly developed BNC has tensile stress and is transparent to visible light. A very small hydrogen content (3.3%) leads to the construction of strong atomic networks of B, N, and C, as well as to highly improved radiation stability.
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