We present the development and performance characterisation of a novel structured illumination microscope (SIM) in which the grating pattern is generated using two optical beams controlled via 2 micro-electro-mechanical system (MEMS) three-axis scanning micromirrors. The implementation of MEMS micromirrors to accurately and repeatably control angular, radial and phase positioning delivers flexible control of the fluorescence excitation illumination, with achromatic beam delivery through the same optical path, reduced spatial footprint and cost-efficient integration being further benefits. Our SIM architecture enables the direct implementation of multi-color imaging in a compact and adaptable package. The two-dimensional SIM system approach is enabled by a pair of 2 mm aperture electrostatically actuated three-axis micromirrors having static angular tilt motion along the x- and y-axes and static piston motion along the z-axis. This allows precise angular, radial and phase positioning of two optical beams, generating a fully controllable spatial interference pattern at the focal plane by adjusting the positions of the beam in the back-aperture of a microscope objective. This MEMS-SIM system was applied to fluorescent bead samples and cell specimens, and was able to obtain a variable lateral resolution improvement between 1.3 and 1.8 times the diffraction limited resolution.
A 3D photoacoustic microscopy (PAM) system is presented and characterized, using optical MEMS and fibre tip transducers as active elements to provide all-optical positioning and read-out. The excitation beam position is controlled using an electrostatically actuated 2-axis MEMS scanner. This allows for fast 3D scanning without motion-induced artefacts caused by stage scanning, and selective imaging of regions of interest. A 20 MHz fibre tip transducer is used for acoustic detection, which allows a variety of sample holders to be used including common approaches such as multi-well plates and petri-dishes.
We present the development and performance characterisation of a novel structured illumination microscope (SIM) in which the grating pattern is generated using two optical beams controlled via 2 micro-electro-mechanical system (MEMS) three-axis scanning micromirrors. The implementation of MEMS micromirrors to accurately and repeatably control angular, radial and phase positioning delivers flexible control of the fluorescence excitation illumination, with achromatic beam delivery through the same optical path, reduced spatial footprint and cost-efficient integration being further benefits. Our SIM architecture enables the direct implementation of multi-colour imaging in a compact and adaptable package. The two-dimensional SIM system approach is enabled by a pair of 2 mm aperture electrostatically actuated three-axis micromirrors having static angular tilt motion along the x- and y-axes and static piston motion along the z-axis. This allows precise angular, radial and phase positioning of two optical beams, generating a fully controllable spatial interference pattern at the focal plane by adjusting the positions of the beam in the back-aperture of a microscope objective. This MEMS-SIM system was applied to fluorescent bead samples and cell specimens, and was able to obtain a variable lateral resolution improvement between 1.3 and 1.8 times the diffraction limited resolution.
We present the development and application of a novel structured illumination microscope (SIM) in which the grating pattern is generated using two optical beams controlled via two micro-electro-mechanical system (MEMS) 3D scanning micromirrors, each having static angular and piston control. This arrangement enables the generation of a fully controllable spatial interference pattern at the focal plane by adjusting the positions of the beams in the back-aperture of a high numerical aperture (NA) microscope objective. The utilization of MEMS micromirrors to control angular, radial and phase positioning for the structured illumination patterns has advantages of flexible control of the fluorescence excitation illumination, with achromatic beam delivery through the same optical path, reduced spatial footprint and cost-efficient integration.
We present the dynamic analysis of a 2-axis electrothermal MEMS scanner, focusing on the step response times for random access imaging. The 1.2 mm diameter single layer silicon mirror shows rise times in the 10-40 ms range for angle changes of 0.4°-4.7°, while fall times are 5-15 ms for the same range, leading to the potential of advanced optimization path planning.
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