High-sensitivity detection of vibrations under high temperatures is a topic of great interest in modern engineering such as thermal engine deep-sea aquaculture factory ship, aerospace, high temperature casting, energy, etc. As traditional accelerometers and some fiber optic F-P accelerometers have shown their sensing limits at about 400 °C and 650 °C, respectively, a high temperature fiber optic F-P accelerometer based on MEMS technology is proposed. To obtain a high-performance chip for the sensor, an examination of the theoretical performance of an L and Г-shaped cantilever beam diaphragm shows a sensitivity of 15.05 nm/g and 53.7 nm/g, respectively, and a wide working frequency range. Thanks to the designed sensor’s various protections, frequency measurements with a high-temperature performance of 850 °C are recorded. The L-shaped cantilever beams diaphragm allows the sensor measurements at 850 °C with a repeatability of 5.46%, a working frequency range of 100-1000 Hz, an experimental sensitivity of 389 mV/g, an overall stability of 8 jumps at its adjacent frequency resolution range over 150 measurements, a linearity of 0.9856 and a maximum relative error maintained below 1.72%. In the field of application, it also exhibits a good relative error of measurement respecting the technical specification of 5 Hz.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.