Vacuum thermal dealloying is a recently developed technique and was newly introduced to produce nanoporous metals, due to its intriguing advantages, i.e., preventing oxidation and producing no chemical waste, etc. Here, we report on the fabrication of nanoporous stainless steel films by vacuum thermal dealloying of sputtered stainless steel–magnesium precursor films. It was found that crack-free nanoporous stainless steel films can be successfully attained under a broad temperature range of 450–600 °C, with a dealloying time of 0.5–2 h. The resulting structure and ligaments were temperature- and time-dependent, and moreover, the condition of “600 °C + 2 h” generated the most homogeneous structure. Moreover, small amounts of residual Mg were found at pore sites in the resultant structures, suggesting that the dealloying was not fully complete.
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