As the power consumption of a large number of microelectronic devices has been continuously reduced in recent years, power supply units of a few microwatts have become sufficient for their operation.Our improved micro-scale thermoelectric generator (p-TEG) is based on polysilicon surface micromachining and is designed to convert waste heat into electrical power. Since this device is compatible With standard CMOS fabrication processes, it can he easily integrated on chip level and matches the needs for low-cost and small-sire systems As thermoelectric materials, both, pure poly-Si and poly-Si7waGe30sh have been investigated. Emphasis was placed on a thermally optimized design and the reduction of the total electrical resistance of the generator. As a result of these improvements, a voltage of 5 V and an electrical power output of 1 pW for a matched consumer is achieved with generators of 1 cm2 in size at a temperature drop of ahout 5 K.
This paper reviews the concepts, status and challenges for the DRAM scaling down to 40nm. The technologies that are discussed are the DRAM cell capacitor structures and materials, as well as the cell transistor structures.
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