Jetting succeeded by accumulation is the characteristic of the vacuum filling, which is different from the conventional pressure-driven flow. In order to simulate this kind of flow, a three-dimensional theoretical model in terms of incompressible and viscous flow is established, and an iterative method combined with finite element method (FEM) is proposed to solve the flow problem. The Lagranian-VOF method is constructed to trace the jetting and accumulated flow fronts. Based on the proposed model and algorithm, a simulation program is developed to predict the velocity, pressure, temperature, and advancement progress. To validate the model and algorithm, a visual experimental equipment for vacuum filling is designed and construted. The vacuum filling experiments with different viscous materials and negative pressures were conducted and compared the corresponding simulations. The results show the flow front shape closely depends on the fluid viscosity and less relates to the vacuum pressure.
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