Single and multilayer of Al2O3 and TiO2 were fabricated on anodized aluminum by atomic layer deposition. The effect of processing parameters on pore sealing and anti-corrosion property was studied. It is concluded that the micropores on anodized aluminum could be sealed by atomic layer deposition oxide films through SEM and staining experiments. The anti-corrosive property is affected mainly by the film thickness and process temperature. The acidic drip and salt spray test shows that the anti-corrosion property is enhanced as the film thickness increase. With the similar thickness, Al2O3/TiO2 multilayer film has the best anti-corrosion property, while the single Al2O3 layer appears the poorest. The complementary roles between two basic materials result in the enhanced application property.
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