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In this work, the fundamentals of planar-type Ar inductively coupled thermal plasmas (ICTPs) with oxygen molecular gas on a substrate have been studied. Previously, aiming at large-area material processing, we developed a planar-type ICTP torch with a rectangular quartz vessel instead of a conventional cylindrical tube. For the adoption of such planar-type ICTP to material processing, it is necessary to sustain the ICTP with molecular gases on a substrate stably and uniformly. To determine the uniformity of the ICTP formed on the substrate, spectroscopic observation was carried out at 3 mm above the substrate. Results showed that the radiation intensities of specified O atomic lines were almost uniformly detected along the surface of the substrate. This means that excited O atoms, which are important radicals for thermal plasma oxidation, are present in the planar-type ICTP uniformly on the substrate.

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<span lang="EN-US">Poor performance of the motor drive system is caused when the direct current-link (DC-link) capacitor voltages of the inverter are not sufficiently generated. This is mainly because of the various load torque changes and input voltage fluctuation. The qZ-source inverter operates with a fully shoot-through technique. This technique causes mismatching between the upper and lower DC-link capacitor voltages. Without capacitor voltage-balancing function, the desired DC-link capacitor voltages could not be provided or maintained when there are load and speed changes. A Sawtooth carrier-based simple boost triple-sixty-degree (TSD) pulse width modulation (PWM) technique is used to drive the qZ-source T-type inverter because this technique can give a more significant boost DC-link voltage than a traditional simple boost PWM technique. Proportional integral (PI) controller is applied for the DC-link voltage controller to achieve the fast response and less steady-state error. The simulation model was constructed for a 4 kW, 400 V, 1,400 rpm induction motor (IM) drive system used in rolling mill using MATLAB/Simulink with and without voltage balancing function. As a result, DC-link voltages of the qZ-source T-type inverter fed the induction motor drive system could be controlled using a capacitor voltage-balancing function and the output power of the motor from the simulation result is approximately equal to 4 kW.</span>

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