The inscription regimes and formation mechanisms of form-birefringent microstructures inside nano-porous fused silica by tightly focused 1030- and 515-nm ultrashort laser pulses of variable energy levels and pulsewidths in the sub-filamentary regime were explored. Energy-dispersion X-ray micro-spectroscopy and 3D scanning confocal Raman micro-spectroscopy revealed the micro-tracks compacted by the multi-shot laser exposure with the nanopores hydrodynamically driven on a microscale to their periphery. Nearly homogeneous polarimetrically acquired subwavelength-scale form-birefringence (refractive index modulation ~10−3) was simultaneously produced as birefringent nanogratings inside the microtracks of wavelength-, energy- and pulsewidth-dependent lengths, enabling the scaling of their total retardance for perspective phase-modulation nanophotonic applications. The observed form-birefringence was related to the hierarchical multi-scale structure of the microtracks, envisioned by cross-sectional atomic-force microscopy and numerical modeling.
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