Although the role of the periodic errors of optical heterodyne interferometers in displacement measurements is fairly well understood, their influence on the calibration of other types of displacement sensor does not seem to be studied as extensively. We have performed a careful analysis of the role of these errors on the calibration of a capacitance displacement sensor, which is integrated into a linear piezoelectric transducer for nanometrology applications over displacement ranges in the sub-micrometre range.Assuming a linear dependence of the output voltage of the capacitance displacement sensor on the displacement it was found analytically that periodic interferometer errors lead to a decaying oscillation of the sensor sensitivity as the displacement range used in the calibration increases. For use of a double path interferometer with a polarization mixing amplitude of 0.5 nm and a polarization mixing wavelength of 79 nm, deviations of sensor sensitivity of 0.3% for a range of 0.2 µm and 0.029% for a range of 1 µm were estimated. The pronounced oscillations of the sensor's sensitivity over very small displacement ranges as predicted by the theoretical description were verified experimentally.
New aromatic diamines were obtained on the basis of available and inexpensive 2, 4, 6‐trinitrotoluene (trotyl, TNT). Monomers obtained were used for the preparation of the new organo‐soluble polyimides containing thiophenoxy and phenoxy side groups.
The reactions of poly(dich1orophosphazenes) and hexachlorocyclophosphazene with bis-(hydroxymethy1)-o-carborane has been studied. By this reactions carborane-containing cardo polyphosphazenes and spiro-o-carboranylene cyclophosphazenes were obtained which had been not described until now. The compounds were characterized.
Curboranhultige CardopolyphosphazeneDie Reaktion von Poly(dich1orphosphazenen) und Hexachlorcyclophosphazenen mit Bis-(oxymethy1)-o-carboran wurde untersucht. Hierbei werden bisher nicht bekannte carboranhaltige Cardopolyphosphazene und Spiro-o-carboranylen-cyclophosphazene erhalten. Die Verbindungen werden charakterisiert. €Capdome icap6opa~codepxau+ue nom~oc@a3enb& B p e s y n b~a~e KoToporo nonysem H o x a p a~~e p~3 0 s a~~ Heonmamare paHee KapnosbIe Kap6OpaHCO~epXaIqHe H3YYeHO B3aHMOAefiCTBHe IIOJIHAliXJIOp@OC@l3eHa H r e K C a X n O p q H K J r O~O C~a 3 e H a C ~H C -(OKCHMeTHJI)-O-Kap6OpaIiOM,
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