This paper discusses the design and performance of a 256 X 256 bolometer-type uncooled infrared detector. First, model calculations are carried out to clarify the relations of the noise equivalent temperature difference (NETD) to the electrical properties ofthe bolometer material. The properties are mainly resistivity , the temperature coefficient ofresistance (TCR) and 1/fnoise. To obtain real-time images with NETD values smaller than 0.15 K for F/i optics, vanadium oxide thin film was developed as the bolometer material, having a sheet resistance range of 5-50kQ /square and a TCR value of -2%/K. This material did not exhibit thermochromism like V02(A), because it was identified as V02(B). The bolometer-array was statistically evaluated and put into the infrared camera. Finally, a thermal image with an NETD of 0.15 K was obtained.
Vanadium dioxide thin films (VO 2 ) have been deposited by laser ablation. The temperature dependence of resistivity and temperature coefficient of resistance (TCR) for each deposition condition were investigated. It was clarified that the TCR at room temperature (RT) can be optimized by controlling the oxygen pressure introduced during deposition as the deposition parameter. In the result, larger TCR's at RT were observed for the oxygen deficient condition of VO 2 than for oxygen-richer samples. Obtained TCR values were 0.072͞K and 0.045͞K at 25 ± C for VO 2 thin films deposited onto R-cut sapphire and SiO 2 ͞Si, respectively.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.