Co 35 6 Fe 50 B 14 4 )-(SiO 2 ) soft magnetic films with electrical resistivity of over 10 000 cm (1 10 4 m) were fabricated on glass substrates by using synchronous triple-RF magnetron sputtering. The magnetic properties, high-frequency permeability characteristics, and microstructure of the films were investigated. Maximum electrical resistivity of about 115 600 cm (1.156 10 3 m) was obtained with a large uniaxal anisotropy field of about 250 Oe, a hard axis coercivity ch of 5.6 Oe, and a saturated magnetization 4 of 8.3 kG. The real part of the relative permeabilitywas about 50, which exhibited a good flat frequency dependence up to 2 GHz. The resonance frequency was higher than 3 GHz. It was found that the heteroamorphous films had soft magnetic properties with high resistivity of over 10 000 cm and high resonance frequency.The films are good candidates for core application in the gigahertz range.Index Terms-(Co 35 6 Fe 50 B 14 4 )-(SiO 2 ) films, gigahertz range, heteroamorphous structure, high resistiviy, soft magnetism.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.