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Effective surface rate constants for oxygen incorporation have been determined for single-crystal Fe-doped SrTiO 3 from chemical relaxation experiments, by in situ, spatially resolved optical absorption spectroscopy, and from tracer exchange experiments, by subsequent secondary ion mass spectrometry analysis. Experiments were carried out as a function of temperature, oxygen partial pressure, and dopant concentration. The effect of various metal films ͑Pt, Ag, Cr͒ and metal oxide films ͑YBa 2 Cu 3 O 7Ϫ␦ and La 0.8 Sr 0.2 CoO 3Ϫ␦ ͒ on the surface reaction kinetics was also investigated. The implications of the results with regard to the mechanisms of chemical and tracer incorporation into SrTiO 3 are discussed.

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