In this work we report on a self-assembled growth of a Ge quantum dot lattice in a single 600-nm-thick Ge+ Al 2 O 3 layer during magnetron sputtering deposition of a Ge+ Al 2 O 3 mixture at an elevated substrate temperature. The self-assembly results in the formation of a well-ordered three-dimensional body-centered tetragonal quantum dot lattice within the whole deposited volume. The quantum dots formed are very small in size ͑less than 4.0 nm͒, have a narrow size distribution and a large packing density. The parameters of the quantum dot lattice can be tuned by changing the deposition parameters. The self-ordering of the quantum dots is explained by diffusion-mediated nucleation and surface-morphology effects and simulated by a kinetic Monte Carlo model.

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Scientific researches are at the inception of flexible energy devices and ferroelectric (FE) materials mark their signature in the process. Particularly, devices based on inorganic FE (IFE) materials find a...

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