Surface transfer doping of hydrogen-terminated diamond induced by high work function V2O5 oxide was investigated on samples with (100) and (111) surface crystal-orientations. An enhancement of sheet hole density and a decrease in sheet resistance were obtained in the case of (111) diamond as compared to (100). In particular, a sheet resistance as low as 1.8 kΩ/◻ and a sheet hole concentration of 1.1 × 1014 cm−2 were obtained by Hall effect measurements for V2O5/H-(111) oriented diamonds, the latter being about twice as high as the one obtained for V2O5/H-(100) oriented diamonds. This was confirmed by capacitance-voltage measurements on metal/V2O5/H-diamond diodes fabricated on the investigated samples, also resulting in the determination of the depth profiles of hole accumulation layers at the diamond surface. X-ray photoelectron spectroscopy measurements of the C1s core level shift were used to determine the differences in surface band bending, leading to a different hole accumulation layer formation efficiency at the V2O5/H-diamond interface. An upward band bending of 0.7 eV and 0.3 eV in response to the surface transfer doping induced by a 10 Å thick V2O5 layer was measured for (111) and (100) diamond surfaces, respectively. This is a further confirmation that V2O5 is more effective in surface transfer doping for H-(111) oriented diamond. The obtained results are very promising in view of the development of high-power metal oxide field effect transistors based on the H-diamond surface.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.
hi@scite.ai
10624 S. Eastern Ave., Ste. A-614
Henderson, NV 89052, USA
Copyright © 2024 scite LLC. All rights reserved.
Made with 💙 for researchers
Part of the Research Solutions Family.