A new manganese-related isotropic electron-spin-resonance signal at g=2.77 has been observed in GaAs. It is shown to arise from the neutral Mn acceptor, MnE0. The analysis gives an answer to the longstanding question of whether the structure of MnE0 corresponds to 3dE4 or do 3dE5+hole. The data clearly favor the latter case, thus revealing that Mn is an exception within the 3d acceptor family in GaAs. (IAF
Thin AlO x films were grown on 4H-SiC by plasma-assisted atomic layer deposition (ALD) and plasma assisted electron-beam evaporation at 300˚C. After deposition, the films were annealed in nitrogen at temperatures between 500˚C and 1050˚C. The films were analyzed by X-ray reflectivity (XRR) and atomic force microscopy (AFM) in order to determine film thickness, surface roughness and density of the AlO x layer. No differences were found in the behavior of AlO x films upon annealing for the two different employed deposition techniques. Annealing results in film densification, which is most prominent above the crystallization temperature (800˚C). In addition to the increasing density, a mass loss of ~5% was determined and attributed to the presence of aluminum oxyhydroxide in as deposited films. All changes in film properties after high temperature annealing appear to be independent of the deposition technique.
Wurtzite Al1−xScxN thin films with scandium Sc concentrations up to x = 0.41 were prepared by reactive pulsed DC magnetron co-sputtering at heater temperatures between 300 °C and 400 °C on Al2O3 substrates. Spectroscopic ellipsometry was used to determine the dielectric functions of wurtzite Al1−xScxN by modeling the spectra with a three-layer model involving parametric oscillator functions for the Al1−xScxN layers. By combining ellipsometry with transmission spectroscopy, we determined the composition dependence of the optical band gap Eg. For x < 0.25, the experimentally determined band gap follows the theoretical prediction with an offset, which arises from residual sub-band gap absorption. For higher Sc concentrations, for which the band gap is expected to become indirect, the experimental data deviate from the theoretical values for the direct band gap. No absorption that can be attributed to cubic ScN crystallites was observed up to x = 0.41, indicating a high phase purity in line with X-ray diffraction data.
The authors report on the stability of mechanical stress with aging and thermal cycling for columnar structured stoichiometric and homogeneous aluminum nitride thin films grown using radio frequency magnetron sputtering technique. The set of deposition parameters were optimized for the best possible orientation of crystallites in the c axis of compositionally stoichiometric films. The as-grown stress in the slightly nitrogen-rich film does not change when exposed to the atmosphere following deposition, while that in the nitrogen-deficient film, it changes due to oxidation. Additionally, the magnitude of as-grown stress has been found to depend on the substrate material in addition to the deposition parameters. The stress in the film grown on a Si(001) substrate was more tensile than in the film grown on a semi-insulating (si) GaAs(001) substrate for a given set of deposition parameters. Furthermore, the stress in the film grown on Si decreased with temperature, while that on si GaAs increased, indicating the thermally induced stress component to be the major component in the residual stress. Upon subsequent cooling the stress changes in both substrates followed the same path as of heating, thus exhibiting no hysteresis with thermal cycles between room temperature and 400 °C
The piezoelectric and spontaneous polarization of wurtzite ScxAl1−xN, GaxAl1−xN, and InxAl1−xN ternary compounds dramatically affects the electrical properties of pseudomorphic MexAl1−xN/GaN, MexAl1−xN/AlN, and MexAl1−xN/InN heterostructures and devices (Me: = Sc, Ga, In), due to bound interface charges caused by gradients in polarization at surfaces and heterointerfaces. We have calculated the piezoelectric and spontaneous polarization of undoped, metal polar ScxAl1−xN barrier layers (0 ≤ x ≤ 0.5) pseudomorphically grown on InN, GaN, and AlN buffer layers, in order to compare the polarization induced surface and interface charges determined to the ones predicted and measured in heterostructures with GaxAl1−xN and InxAl1−xN barriers (0 ≤ x ≤ 1.0). To facilitate the inclusion of the predicted polarization in future simulations, we give explicit prescriptions to calculate polarization induced bound interface charges for arbitrary x and barrier thicknesses up to 50 nm in each of the ternary III-N alloy heterostructures. In addition, we predict the electron sheet charges confined in heterostructures with positive polarization induced interface charges taking limitations for the epitaxial growth by strain and critical barrier thicknesses into account. Based on these results, we provide a detailed comparison of the sheet resistances and current-carrying capabilities of the heterostructures investigated, pointing to a superior potential of ScAlN/GaN based heterostructures for processing improved high electron mobility transistors for high-frequency and power electronic applications.
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