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As driving force generation mechanism for the micro machines, a pin-type actuator being of a piezoelectric bimorph plate with a contact pin to generate the 2-dimensional driving force has been studied to miniaturize.In the previous study, the fundamental mechanical characteristics of several pin-type actuators with the bimorph plate sizes of 26" x26mm and 13" X 13" and the micro mobile machine for @36mm tube using eight pieces of those with the size of 13 mm X 13" were evaluated, In this paper, miniaturized pin-type actuators with the bimorph plate size of 6. 5" X 6. 5" and 5mm X 5mm have been prepared, and their fundamental performances were examined to estimate the micro characteristics. Furthermore, the micro mobile machine in tube has been improved so as to set the driving circuit into the machine body and its performances have been also evaluated. Besides, the vibrational analysis of the pin-type actuator with the size of 26mmx 26" has been done by finite element method with the piezoelectric coupling effect, As a result, the superposition of natural vibrational modes with the phase difference seems to generate the directional driving force at the contact pin tip. 36"tube using eight pieces of 013" models had been developed to prove the performance of multiple actuators, that is the high-speed movement for the forward, backward, rotational and spiral modes [2,3]. However, it has been pointed out the severe problem on the leading wires with extemal driving circuit for the machine control signal and the electric power. In this study, the improved machine with the internal driving circuit has been developed to aim at autonomous driving, and the relationship between its driving speed and force has been examined. Furthermore, the machine control by DC power has been also evaluated in consideration of the actual operation which requires high resolutional positioning.Moreover, the driving force generation mechanism of pin-type actuator has been studied by the vibrational analysis based on the finite element method with the piezoelectric coupling effect to optimize the dynamical characteristics and to estimate the miniaturized performances. In this study, typical model of a 2 6 m m has been used as the primary simulation. The further miniaturization study will be proceeded on the basis of their simulation.

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