Cell sorting is an important diagnostic tool used in various aspect of medical prognosis. Numerous cell sorting techniques are currently available on market but they are quite bulky, expensive and at the same time requires very trained operators. In this paper we report on wafer level fabrication technique that will allows for a small form factor device targeting cell sorting. We give detailed overview for the fabrication of our miniaturized cell sorter that is formed with a CMOS compatible process. It used standard fabrication technique in combination with photo-patternable polymer, that has excellent properties for microfluidics applications. The ability to process on wafer level distinguish this from other processes, whose yields are limited to few test samples. The device fabrication includes: processing of micro-heaters, definition of polymer microfluidic channels and collective die-to-wafer bonding of glass substrate onto the polymer channels. We report on the initial characterization of the cell sorting targeting sorting rate and sorting yield. We have achieved sorting rate of 5,000 cells/s and yield of 70% is obtained in initial investigations.
Cell sorting is an important diagnostic tool in medical field to separate different type of cells. Various techniques are employed for sorting with main mechanism being cell analysis and then separation either by electric or magnetic field. In this paper we explain the fabrication process for tungsten microheaters on silicon and polymer microfluidic for a formation of a generic platform that can be used for the various cell sorting applications. Polymer material is not only used for the formation of channel for fluidics movement but also used as bonding interface between the silicon wafer and the glass. We report on the bonding strength of the polymer material. It shows that our devices can withstand a pressure in excess of 3 bar which is more than sufficient for most microfluidic applications such as cell sorting. Characterization of micro stream bubble generation life cycle is presnted. The sorting efficiency of our device is reported, with initial characterization done beads to determine sorting rate and sorting yield. We achieved sorting rate of 1,000 beads/s with sorter purity of up to 98 % in initial investigations.
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