In microelectronics manufacturing, macro-micro actuation stages are typically applied to obtain a high-precision positioning at a high acceleration. Macro-micro actuation stage comprises a voice coil motor that achieves a highacceleration motion and a piezoelectric stack actuator which realizes nano-positioning motion. However, high acceleration and nano-positioning are a pair of interacted contradictions. Especially, vibration generated from the high-acceleration motion is the dominating obstacle for enhancement of the nano-positioning implementation. The concentration of the article is a design of a linear macro-micro actuation stage considering vibration isolation. In particular, a floating stator system is proposed to suppress the stage's vibration and further guarantee a higher precision positioning. Additionally, a flexure hinge mechanism connected to the voice coil motor serially is proposed to achieve a linear motion guide and preload to the piezoelectric stack actuator. The results show that the isolate vibration of the floating stator system is effective in both the time and frequency domain analysis of test. And precision positioning is also further validated experimentally through the flexure hinge mechanism and other components.
Connection frame, as a key module in macro-micro motion platform, is employed to realize a high acceleration, high speed and ultra-precision positioning motion. In the paper, six working conditions of connection frame are obtained by analyzing its driving processes. The maximum deformation in the different working conditions is calculated by the mechanical analysis which affects ultra-precision positioning. Moreover, the maximum deformation of thermal-structural coupling analysis increases the influence on the positioning. Under the same situation, the change trends of deformation and stress distribution of connection mechanism can be obtained by changing the surface loads. The maximum deformation and stress increase with the loads. However, for ever-increasing market demand, it is not adequate to only consider high acceleration under accuracy requirement. The higher acceleration is needed by light weight of connection frame. Therefore, an optimization model is built and studied, which takes the weight of connection frame as objective and takes the thermal deformation as constraint. Connection frame structure model can be calculated in ANSYS and the optimal solution can be obtained by genetic algorithm (GA) in MATLAB. With MATLAB and ANSYS optimization, the rate of convergence has been improved by 3%. Design variables for optimal solution are obtained. The weight and the maximum thermal-structural coupling displacement have been improved by 24.3% and 27.3% respectively. The first six order vibration modes of connection frame are obtained by the finite element method. And the simulation data can be verified by experiment. At last, an optimization connection frame structure considering thermal-structure coupling deformation is obtained.
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